The Study of the DLC and DLC-Si Coating Structure on Mechanical Properties

  • Z. Budinská
  • N. Ganev
  • R. Novák
  • Z. Pala
  • I. Štěpánek
  • D. Tischler
Keywords: DLC coatings, DLC-Si coatings, X-ray diffraction, mechanical properties

Abstract

In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal structure of the coatings on their mechanical properties was studied.

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Published
2013-04-01
How to Cite
[1]
Z. Budinská, N. Ganev, R. Novák, Z. Pala, I. Štěpánek, and D. Tischler, “The Study of the DLC and DLC-Si Coating Structure on Mechanical Properties”, Int. j. eng. technol. innov., vol. 3, no. 2, pp. 104-113, Apr. 2013.
Section
Articles