Design Optimization of a Capacitive Sensor for Mass Measurement of Nanometer-Sized Exhaust Carbon Particles
DOI:
https://doi.org/10.46604/peti.2023.10200Keywords:
capacitive sensing, nanometer-sized particulate mass, capacitive sensor, mass measurementAbstract
Nanometer-sized carbon particulates generated by incomplete combustion in heavy-duty vehicles are harmful to human health. A high-resolution technique is needed to detect and measure these pollutants. This study aims to optimize a capacitive sensor design for detecting and measuring particulates. Firstly, the effect of design parameters on particulate detection and sensor compliance sensitivity is investigated by using the finite element method. By comparing the simulation results with literature findings for performance validation, the sensor structure is optimized to detect lower particulate concentrations. The simulation result shows that particulate detection sensitivity has linear variations with changes in particulate mass. With optimum electrode spacing and top insulation layer thickness of 5 µm, the sensor can detect a particulate deposition of 0.033 mg/min and generate a maximum capacitance of 581 pF. Since the optimized design can measure particulate deposition at a lower range and with higher sensitivity, it is suitable to be applied to detect nanometer-sized carbon particulates.
References
H. Husted, G. Roth, S. Nelson, L. Hocken, G. Fulks, and D. Racine, “Sensing of Particulate Matter for On-Board Diagnosis of Particulate Filters,” SAE International Journal of Engines, vol. 5, no. 2, pp. 235-247, May 2012.
G. Hagen, M. Feulner, R. Werner, M. Schubert, A. Muller, G. Riess, et al., “Capacitive Soot Sensor for Diesel Exhausts,” Sensors and Actuators B: Chemical, vol. 236, pp. 1020-1027, November 2016.
B. Zhao, C. Chen, X. Yang, and A. C. K. Lai, “Comparison of Three Approaches to Model Particle Penetration Coefficient through a Single Straight Crack in a Building Envelope,” Aerosol Science and Technology, vol. 44, no. 6, pp. 405-416, April 2010.
P. Sydenham and R. Thorn, Handbook of Measuring System Design, vol. 2, UK: John Wiley & Sons, 2005.
A. V. Mamishev, K. Sundara-Rajan, F. Yang, Y. Du, and M. Zahn, “Interdigital Sensors and Transducers,” Proceedings of the IEEE, vol. 92, no. 5, pp. 808-845, May 2004.
C. Sapsanis, H. Omran, V. Chernikova, O. Shekhah, Y. Belmabkhout, U. Buttner, et al., “Insights on Capacitive Interdigitated Electrodes Coated with MOF Thin Films: Humidity and VOCs Sensing as a Case Study,” Sensors, vol. 15, no. 8, pp. 18153-18166, August 2015.
C. Sapsanis, S. Sivashankar, H. Omran, U. Buttner, and K. N. Salama, “Capacitive Immunosensor for C-Reactive Protein Quantification,” IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS), August 2015.
H. Omran, M. Arsalan, and K. N. Salama, “A Robust Parasitic-Insensitive Successive Approximation Capacitance-to-Digital Converter,” Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, September 2014.
H. Omran, M. Arsalan, and K. N. Salama, “7.9 pJ/Step Energy-Efficient Multi-Slope 13-bit Capacitance-to-Digital Converter,” IEEE Transactions on Circuits and Systems II: Express Briefs, vol. 61, no. 8, pp. 589-593, August 2014.
J. W. Gardner, P. K. Guha, F. Udrea, and J. A. Covington, “CMOS Interfacing for Integrated Gas Sensors: A Review,” IEEE Sensors Journal, vol. 10, no. 12, pp. 1833-1848, December 2010.
P. W. Oluwasanya, G. Rughoobur, and L. G. Occhipinti, “Design, Modeling and Simulation of a Capacitive Size-Discriminating Particulate Matter Sensor for Personal Air Quality Monitoring,” IEEE Sensors Journal, vol. 20, no. 4, pp. 1971-1979, February 2020.
R. S. Jachowicz and S. D. Senturia, “A Thin-Film Capacitance Humidity Sensor,” Sensors and Actuators, vol. 2, pp. 171-186, 1981-1982.
X. B. Li, S. D. Larson, A. S. Zyuzin, and A. V. Mamishev, “Design Principles for Multichannel Fringing Electric Field Sensors,” IEEE Sensors Journal, vol. 6, no. 2, pp. 434-440, April 2006.
X. Hu and W. Yang, “Planar Capacitive Sensors – Designs and Applications,” Sensor Review, vol. 30, no. 1, pp. 24-39, 2010.
A. Kothuru and S. Goel, “Electronic Nasal Pod: A 3D Printed Device to Filter and Electrochemically Detect Pollutants,” IEEE Sensors, October 2020.
S. Zargari, S. Falaki, and H. Veladi, “Design and Finite Element Analysis of a MEMS Based Capacitive Pressure Sensor Using CNT/PDMS Nanocomposite Electrodes,” 24th Iranian Conference on Electrical Engineering, May 2016.
Y. Huang, Z. Zhan, and N. Bowler, “Optimization of the Coplanar Interdigital Capacitive Sensor,” AIP Conference Proceedings, vol. 1806, no. 1, article no. 110017, February 2017.
R. M. D. Santos, J. M. Sallese, M. Mattavelli, A. S. Nunes, C. Dehollain, and D. Barrettino, “High Precision Capacitive Moisture Sensor for Polymers: Modeling and Experiments,” IEEE Sensors Journal, vol. 20, no. 6, pp. 3032-3039, March 2020.
P. Wang, Q. Lu, and Z. Fan, “Evolutionary Design Optimization of MEMS: A Review of Its History and State-of-the-Art,” Cluster Computing, vol. 22, no. 4, pp. 9105-9111, July 2019.
P. W. Oluwasanya, G. Rughoobur, and L. G. Occhipinti, “Comparison of Analytical and Numerical Methods of Obtaining Coplanar Capacitance of Microelectrodes for Particulate Matter Detection,” IEEE Sensors Journal, vol. 20, no. 15, pp. 8631-8636, August 2020.
D. Back, D. Theisen, W. Seo, C. S. J. Tsai, and D. B. Janes, “Development of Interdigitated Capacitive Sensor for Real-Time Monitoring of Sub-Micron and Nanoscale Particulate Matters in Personal Sampling Device for Mining Environment,” IEEE Sensors Journal, vol. 20, no. 19, pp. 11158-11597, October 2020.
F. Y. Niyat and M. H. S. Abadi, “COMSOL-Based Modeling and Simulation of SnO2/rGO Gas Sensor for Detection of NO2,” Scientific Reports, vol. 8, article no. 2149, February 2018.
C. H. Weng, G. Pillai, and S. S. Li, “A PM2.5 Sensor Module Based on a TPoS MEMS Oscillator and an Aerosol Impactor,” IEEE Sensors Journal, vol. 20, no. 24, pp. 14722-14731, December 2020.
F. Foncellino, L. Barretta, E. Massera, and A. Corigliano, “Piezoelectric MEMS for Microparticles Detection,” IEEE Sensors, October-November 2021.
P. Das, S. Ghosh, S. Chatterjee, and S. De, “A Low Cost Outdoor Air Pollution Monitoring Device with Power Controlled Built-In PM Sensor,” IEEE Sensors Journal, vol. 22, no. 13, pp. 13682-13695, July 2022.
H. Cho and Y. Baek, “Practical Particulate Matter Sensing and Accurate Calibration System Using Low-Cost Commercial Sensors,” Sensors, vol. 21, no. 18, article no. 6162, September 2021.
N. Singh, M. Y. Elsayed, and M. N. El-Gamal, “Towards the World’s Smallest Gravimetric Particulate Matter Sensor: A Miniaturized Virtual Impactor with a Folded Design,” Sensors, vol. 22, no. 5, article no. 1727, March 2022.
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